"四氟化硅处理" can be translated as "silicon tetrafluoride treatment" or "handling/processing of silicon tetrafluoride".
The first option ("silicon tetrafluoride treatment") is more concise and commonly used when referring to the specific process involving silicon tetrafluoride.
The second option provides more flexibility in context, emphasizing the act of handling or processing the substance.
Choose the one that best fits your specific context.