"四氟化硅处理" can be translated as "silicon tetrafluoride treatment" or "handling/processing of silicon tetrafluoride".
Silicon tetrafluoride treatment emphasizes the process or operation involving silicon tetrafluoride.
Handling/processing of silicon tetrafluoride focuses more on the act of managing or treating silicon tetrafluoride itself.
Choose the phrase that best fits the context of your sentence.